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245: $a Handbook of Microlithography,Micromachining, and Microfabrication
245: $b
100: $a
082: $a 671.35 CHO
650: $a
020: $a 819423785
440: $v , , , , ,
250: $b The Institution of Electrical Engineers,
250: $c 1997
250: $a 1st
300: $a 768
020: $c 0.00 PKR
041: $a English
Available Yes, Accessions:[ 41BB, 42BB, 43BB, 44BB, 45BB, 46BB ]
246:
246: # Microfabrication